Aluminum nitride product / Clamp ring

Aluminum nitride product / Clamp ring

Product Clamp ring
Material Aluminum Nitride
Processing Method CNC machining
Size O.D.Φ350 x I.D.Φ300 x 2 mm (T)
Application Used in semiconductor-manufacturing machines.
Description A clamp ring used to hold or handle the silicon wafer. ALN thermal conductivity 90w/mk, 170w/mk, 200w/mk or 230w/mk would be available.

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