SiC ring

SiC ring

Product SiC ring
Material Silicon carbide
Processing Method CNC machining
Size O.D.Φ50 x I.D.Φ40 x 5 mm(T)
Application Silicon carbide ring used as a chamber component.
Description SiC ring is used in plasma-enhanced CVD chambers. Silicon carbide has the properties such as high plasma and heat resistance.

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