Aluminum Nitride (AlN)
Heater Substrates
| Product Name | Heater Substrates |
|---|---|
| Material | Aluminum Nitride (AlN) |
| Process | Machining Center Processing |
| Remarks |
φ200 × t5 Groove Machining with Depth of 0.3 mm Semiconductor Manufacturing Equipment High Thermal Conductivity, Plasma Resistance |