We introduce machining examples of silicon carbide.
Silicon carbide is widely used for applications that take advantage of its excellent thermal properties and chemical resistance.
Additionally, MMC made by silicon infiltration into SiC is also widely used for its superior thermal properties.
Silicon Carbide (SiC)
High Hardness · High Rigidity · High Thermal Conductivity · Corrosion Resistance
Compatible with Diffusion Bonding
Typical properties of silicon carbide
| Item | Vickers Hardness HV (GPa) |
Flexural Strength (MPa) | Fracture Toughness (MPam¹/²) |
Coefficient of Thermal Expansion (×10-⁶/℃) |
Thermal Conductivity (W/(m·K)) |
Thermal Shock Resistance (℃) | Dielectric Strength (kV/mm) | Wear Resistance (Blast Wear Volume) (μm) |
|---|---|---|---|---|---|---|---|---|
| Chemical Formula·Purity | ||||||||
| Silicon Carbide (SiC) |
24 | 500 | 3 | 2.9 | 150 | 450 | 25 | 1.6 |
Typical properties of single-crystal SiC
物性データ
| Item | Color | Mohs Hardness | Bulk Density (g/㎠) |
Coefficient of Thermal Expansion (×10-⁶/℃) |
Electrical Resistivity Ω·cm |
Thermal Conductivity | Band Gap | Breakdown Electric Field |
|---|---|---|---|---|---|---|---|---|
| Chemical Formula | ||||||||
| 4H-SiC N-type |
Dark Green (Transparent) | 9.2 | 3.21 | (4-5) x 10-⁶/K | 0.015–0.028 | 420 W/m · K | 3.23eV | (3-5) x 10⁶V/cm |
| 4H-SiC V-type |
Skin Color (Transparent) | 9.2 | 3.21 | (4-5) x 10-⁶/K | >1x10⁵Ω | 490 W/m · K | 3.23eV | (3-5) x 10⁶V/cm |
Applications Utilizing Material Properties
| Item | Features | Applications |
|---|---|---|
| High Density | · Extremely Hard and Scratch-Resistant |
· Components Sensitive to Scratches Trays, Bases |
|
Maximum Service Temperature Low Thermal Expansion High Thermal Conductivity High Thermal Shock Resistance |
· Usable at High Temperatures · Low Thermal Expansion with Minimal Warping and Distortion at Elevated Temperatures · High Thermal Conductivity for Efficient Heat Transfer · Resistant to Rapid Heating and Cooling |
· Components Requiring Minimal Thermal Influence · Components Requiring Heat Dissipation Heater Surrounding Components, Radiation Plates |
| Good Chemical Resistance | · Resistant to Acids, Alkalis, and Reactive Gases |
· Components Exposed to Chemicals · Components Requiring Removal of Deposits with Acids and Alkalis |
Machinable Sizes
| Item | Sizes (mm) | Item | Sizes (mm) |
|---|---|---|---|
| Plate Dimensions | Φ400 × t20 | Hole Diameter | Φ0.1– |
| Rod Dimensions | Φ50 × 300 | Hole Depth | 20D (～Φ1.5)、200 (Φ1.5–) |
| Grooves | Width 0.1– | Number of Holes | 1–100 |
| Steps (Protrusions / Recesses) | –30 | Threads | M2– |
