Applications by Material

Quartz Glass · Heat-Resistant Glass

Heat resistance · Low Thermal Expansion · Electrical Insulation · Chemical Resistance
Compatible with Diffusion Bonding

We will introduce examples of processing quartz glass and heat-resistant glass.
It is generally possible to manufacture larger materials than ceramics, and both the material costs and processing costs are often cheaper. It is often used in applications that take advantage of its thermal properties and chemical resistance.
When transparency is required for ultraviolet and infrared light transmission or visual confirmation, we outsource wrapping and polishing.

Typical properties of quartz glass and heat-resistant glass

Item Purity
SiO₂
(%)		 Vickers Hardness
HV (GPa)		 Flexural Strength (MPa) Maximum Service Temperature
(℃)		 Coefficient of Thermal Expansion
(×10-⁶/℃)		 Thermal Conductivity
(W/(m·K))		 Light transparency Volume Resistivity (Ω･㎝)
Material
Chemical Formula
Quartz glass
(SiO₂)		 99.99 9 94 1,070
(distortion point)		 0.64 1 Yes 5 ×10¹⁶
Tempax 81 5 - 518
(distortion point)		 3.2 1.2 Yes -

Applications Utilizing Material Properties

Item Features Applications
Maximum Service Temperature · High Maximum Service Temperature · Parts used under high temperatures
· High-precision parts in environments with severe temperature changes
· Parts exposed to rapid heating and cooling
· High temperature insulation parts
· Light source peripheral parts
· Window parts
· Parts in reactive atmospheres
· Pharmaceutical containers and pathway parts
· Components for Plasma Environments
· Semiconductor manufacturing equipment, etc
· Parts in areas where contamination is a concern
· Parts such as mirrors that are sensitive to material defects
Low thermal expansion coefficient · It has a low coefficient of linear expansion, so dimensional changes due to temperature are small and warping and distortion are unlikely to occur
High Thermal Shock Resistance · Resistant to Rapid Heating and Cooling
Low conductivity · Low Thermal Conductivity with Insulation Effect
Light transparency · Transmits ultraviolet, infrared, visible light, and laser light
Good Chemical Resistance · Quartz glass has good acid resistance
· Resistant to reactive gases
· Quartz glass is plasma resistant (special grade only)
High purity · Fused silica is highly pure and free of contaminants
Fewer Material Defects · Fewer material defects than ceramics
· Surface roughness can be made mirror-like
Good Machinability · It has good processability, a long track record of processing, and established processing conditions

Machinable Sizes

Item Sizes (mm) Item Sizes (mm)
Plate Dimensions 600 × 800 ×50 Hole Diameter Φ0.03–
Rod Dimensions Φ100 × 300 Hole Depth 400
Grooves Width 0.05– Number of Holes –5,000
Steps (Protrusions / Recesses) –100 Threads M2～ (Requires insertion of a helical insert)

Quartz glass and heat-resistant glass processing examples

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