Machining Examples

SiC susceptor

Product SiC susceptor
Material Silicon carbide
Processing Method Embossing
Size

embossment of Φ1.0 x 0.5 mm
Application

Used for semiconductor manufacturing devices
Description

A susceptor made of silicon carbide is used to heat and hold wafers. Embossment of φ1.0 X 0.5 mm(H) is processed on the SiC susceptor. Silicon carbide has excellent heat conductivity and is a popular material for heater related components.
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