Shower plate

Shower plate

Product Shower plate
Material Silicon carbide
Processing Method Micro-hole drilling
Size Φ300 x 8 mm(T)
Application Used in semiconductor manufacturing devices.
Description A shower plate made of silicon carbide is used in plasma surface treatment equipment. It has 800 micro-holes of Φ1.0 mm drilled on SiC shower plate. Silicon Carbide has high chemical and corrosion resistance, and is a popular material for parts used in semiconductor processing equipment.

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1197-4, Hosoe-cho, Nagahama City, Shiga, 526-0105 Japan
Phone: +81-749-51-9021
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info@top-seiko.co.jp