Shower plate

Product	Shower plate
Material	Silicon carbide
Processing Method	Micro-hole drilling
Size	Φ300 x 8 mm(T)
Application	Used in semiconductor manufacturing devices.
Description	A shower plate made of silicon carbide is used in plasma surface treatment equipment. It has 800 micro-holes of Φ1.0 mm drilled on SiC shower plate. Silicon Carbide has high chemical and corrosion resistance, and is a popular material for parts used in semiconductor processing equipment.

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