Machining Examples

Shower plate

Product Shower plate
Material Silicon carbide
Processing Method Micro-hole drilling

Φ300 x 8 mm(T)


Used in semiconductor manufacturing devices.


A shower plate made of silicon carbide is used in plasma surface treatment equipment. It has 800 micro-holes of Φ1.0 mm drilled on SiC shower plate. Silicon Carbide has high chemical and corrosion resistance, and is a popular material for parts used in semiconductor processing equipment.

Silicon CarbideMachining Examples