Machining Examples

SiC susceptor

Product SiC susceptor
Material Silicon carbide
Processing Method Embossing

embossment of Φ1.0 x 0.5 mm


Used for semiconductor manufacturing devices


A susceptor made of silicon carbide is used to heat and hold wafers. Embossment of φ1.0 X 0.5 mm(H) is processed on the SiC susceptor. Silicon carbide has excellent heat conductivity and is a popular material for heater related components.

Silicon CarbideMachining Examples