Molybdenum : Disffusion Bonding Cooling Plate

Outer diameter:  270mm dia.   □ Internal flow channel: *7 wide x 4mm high

Channels for cooling :

Width of 270mm , 6.5 mm thick Molybdenum (Mo) plates are bonded together. Flow channels are created inside.
He leak test confirmed that it is less than 5.5×10^-11[Pa-m^3/sec].
It can be used for semiconductor manufacturing equipment applications.