Machining Examples

Diffusion Bonding of Molybdenum – Cooling plate

Product Molybdenum Diffusion Bonding - Cooling Plate
Material Molybdenum (Mo)
Processing Method Two Molybdenum plates of width 270mm are bonded together.

Molybdenum : Disffusion Bonding Cooling Plate


Outer diameter:  270mm dia.    Internal flow channel: *7 wide x 4mm high

Channels for cooling :

Channels inside Molybdenum plate



Width of 270mm , 6.5 mm thick Molybdenum (Mo) plates are bonded together. Flow channels are created inside.
He leak test confirmed that it is less than 5.5×10^-11[Pa-m^3/sec].
It can be used for semiconductor manufacturing equipment applications.

MolybdenumMachining Examples