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Shower plate
| Product | Shower plate |
|---|---|
| Material | Silicon carbide |
| Processing Method | Micro-hole drilling |
| Size | Φ300 x 8 mm(T) |
| Application | Used in semiconductor manufacturing devices. |
| Description | A shower plate made of silicon carbide is used in plasma surface treatment equipment. It has 800 micro-holes of Φ1.0 mm drilled on SiC shower plate. Silicon Carbide has high chemical and corrosion resistance, and is a popular material for parts used in semiconductor processing equipment. |
