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SiC susceptor
| Product | SiC susceptor |
|---|---|
| Material | Silicon carbide |
| Processing Method | Embossing |
| Size | embossment of Φ1.0 x 0.5 mm |
| Application | Used for semiconductor manufacturing devices |
| Description | A susceptor made of silicon carbide is used to heat and hold wafers. Embossment of φ1.0 X 0.5 mm(H) is processed on the SiC susceptor. Silicon carbide has excellent heat conductivity and is a popular material for heater related components. |
