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SiC ring
| Product | SiC ring |
|---|---|
| Material | Silicon carbide |
| Processing Method | CNC machining |
| Size | O.D.Φ50 x I.D.Φ40 x 5 mm(T) |
| Application | Silicon carbide ring used as a chamber component. |
| Description | SiC ring is used in plasma-enhanced CVD chambers. Silicon carbide has the properties such as high plasma and heat resistance. |
