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Aluminum nitride product / Clamp ring

Product Clamp ring
Material Aluminum Nitride
Processing Method CNC machining
Size

O.D.Φ350 x I.D.Φ300 x 2 mm (T)

Application

Used in semiconductor-manufacturing machines.

Description

A clamp ring used to hold or handle the silicon wafer. AlN thermal conductivity 90w/mk, 170w/mk, 200w/mk or 230w/mk would be available.

Aluminum NitrideMachining Examples