Aluminum nitride product / Clamp ring
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Product | Clamp ring |
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Material | Aluminum Nitride |
Processing Method | CNC machining |
Size | O.D.Φ350 x I.D.Φ300 x 2 mm (T) |
Application | Used in semiconductor-manufacturing machines. |
Description | A clamp ring used to hold or handle the silicon wafer. AlN thermal conductivity 90w/mk, 170w/mk, 200w/mk or 230w/mk would be available. |