Machining Examples

Aluminum nitride product / AlN substrate with crossed v-grooves

Product AlN substrate with crossed v-grooves
Material Aluminum Nitride
Processing Method Crossed v-grooving

75 x 75 x 1 mm(T) / 140 grooves;1.0±0.05 width & 1.0±0.05 depth


Aluminum nitride heater substrate.


AlN grooves machined substrate for heater apparatus. There are 140 v-grooves(1.0±0.05 width & 1.0±0.05 depth) processed on the surface of the substrate. They make the heat radiation areas larger and realize the rapid heating and cooling.

Aluminum NitrideMachining Examples