Machining Examples

Aluminum nitride product / ALN substrate with v-grooves

Product ALN substrate machined V-grooves
Material Aluminum Nitride
Processing Method V-grooving machining

75 x 75 x 1 mm(T) / Grooves;1.0±0.05 width & 1.0±0.05 depth


Aluminum nitride heater substrate


ALN grooves machined substrate for heater apparatus. There are 70 v-grooves(1.0±0.05 width & 1.0±0.05 depth) processed on the surface of the substrate. They make the heat radiation areas larger and realize the rapid heating and cooling.

Aluminum NitrideMachining Examples